Lithographyisthestepthatallowsthedefinitionofthepatternonthesubstrate:thankstoapolymerresist,ａndusingaradiationsexposure,itfabricatesamaskabovethematerialtobepatterned.Itisacriticalsteptogettheshapesofthemicrostructures,eitherinMEMSormicroe...

Lift-offprocessinmicrostructuringtechnologyisamethodofcreatingstructures(patterning)ofatargetmaterialonthesurfaceofasubstrate(ex.wafer)usingasacrificialmaterial(ex.Photoresist).Itisanadditivetechniqueasopposedtomoretraditionalsubtractingtec...